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Figure 6 | ROBOMECH Journal

Figure 6

From: Miniaturized load sensor using quartz crystal resonator constructed through microfabrication and bonding

Figure 6

Process flow of the sensor fabrication. (a) Electrode patterns was formed by sputtering, (b) sheet resist was laminated, (c) sheet resist was pattered by exposure and development, (d) quartz crystal was etched by sand blasting, (e) photoresist(OFPR) was patterned by exposure and development, (f) silicon was etched by DRIE, (g) photoresist(SU-8) was patterned by exposure and development, (h) silicon was etched by DRIE, and (i) quartz crystal and silicon were bonded.

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