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Table 2 Coefficients of identified transfer functions

From: High precision control model of large-sized gantry-type linear motor slider

i

1

2

3

4

ai1

151.83

117.84

115.93

138.88

ai0

4.46 × 105

4.29 × 105

4.31 × 105

4.51 × 105

bi2

3.77

− 0.159

− 0.157

3.79

bi1

475.89

324.79

299.97

468.46

bi0

7.95 × 105

6.25 × 105

6.24 × 105

7.76 × 105