Table 1 The optimization trials of fabrication conditions by using “Nanoscribe Photonic Professional” (\(63\times\), NA0.75)
From: Miniaturization effect of electroosmotic self-propulsive microswimmer powered by biofuel cell
Condition | Total thickness (μm) | Laser power (mW) | Scan speed (μm/s) | Result |
|---|---|---|---|---|
(1) 1L(SU-8) | 0.5–9.0 | \(\ge 3.0\) | 10–30 | OK |
(2) 1L(CPC) | 0.5–1.0 | \(\le 2.5\) | 10 | OK |
(3) 3L(CPC/SU-8/CPC) | 12.0 | 2.5–6.0 | 10 | NG |
(4) 3L(CPC/NCPC/CPC) | 12.0 | \(\le 2.5\) | 10 | NG |
(5) 3L(CPC/NCPC/CPC)+buffer(SU-8) | 12.0 + 9.0(buffer) | \(\le 2.5\) | 10 | OK |