Skip to main content

Advertisement

Springer Nature is making SARS-CoV-2 and COVID-19 research free. View research | View latest news | Sign up for updates

Table 1 The optimization trials of fabrication conditions by using “Nanoscribe Photonic Professional” (\(63\times\), NA0.75)

From: Miniaturization effect of electroosmotic self-propulsive microswimmer powered by biofuel cell

Condition Total thickness (μm) Laser power (mW) Scan speed (μm/s) Result
(1) 1L(SU-8) 0.5–9.0 \(\ge 3.0\) 10–30 OK
(2) 1L(CPC) 0.5–1.0 \(\le 2.5\) 10 OK
(3) 3L(CPC/SU-8/CPC) 12.0 2.5–6.0 10 NG
(4) 3L(CPC/NCPC/CPC) 12.0 \(\le 2.5\) 10 NG
(5) 3L(CPC/NCPC/CPC)+buffer(SU-8) 12.0 + 9.0(buffer) \(\le 2.5\) 10 OK
  1. L: Layer, CPC: SU-8 and AgNPs of 7 vol\(\%\), NCPC: SU-8 and \(\hbox {C}_{{60}}\) NPs of 2 vol\(\%\)