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Table 1 Comparison of sensor characteristics

From: Miniaturized load sensor using quartz crystal resonator constructed through microfabrication and bonding

  Size [mm] (Volume [mm3]) Sensitivity [Hz/N] Stability of sensor output for 3 min [mN]
A. Asakura et al. [[13]] ϕ13 × 13 (1724.6) 360 22.5
K. Narumi et al. [[14]] ϕ7 × 11 (423.1) 573 3.21
Fabricated sensor 4 × 5.6 × 1.1 (24.6) 1458 0.06