From: Miniaturized load sensor using quartz crystal resonator constructed through microfabrication and bonding
Size [mm] (Volume [mm3])
Sensitivity [Hz/N]
Stability of sensor output for 3 min [mN]
A. Asakura et al. [[13]]
ϕ13 × 13 (1724.6)
360
22.5
K. Narumi et al. [[14]]
ϕ7 × 11 (423.1)
573
3.21
Fabricated sensor
4 × 5.6 × 1.1 (24.6)
1458
0.06
